 |
|
 | Blanks, windows, substrates, lenses, boules etc. |
| All possible orientations |
| EPI-polished surface quality available |
| chamber windows for endpoint detection and observation |
| heater windows |
| microwave windows |
| microwave plasma tubes and components |
| thermocouple protection sheaths |
| lift pins |
| gas delivery plates (GDP's and showerheads) |
| end effectors and blades |
| focus rings |
| optical sensors and lightpipes |
| dummy wafers |